The yield rate is the lifeline of the semiconductor industry. From semiconductor materials, integrated circuit design, silicon wafer production, circuit manufacturing to packaging and testing, impurity contamination introduced by each process may cause semiconductor device defects.

Excellent Trace Impurity Analysis and Pollution Control

The semiconductor industry generally requires the purity of silicon wafers to be above 99.9999999%. Accurate detection of impurities in semiconductor manufacturing materials is essential to ensure the quality and yield of components. As modern semiconductor components become smaller and smaller, the potential negative impact of impurities on component speed and profit is also increasing.

Due to the interference of Si-based samples, quadrupole ICP-MS is difficult to determine trace amounts of phosphorus, but it can be easily done in the resolution mode of high-resolution ICPMS. Through vapor phase decomposition high-resolution inductively coupled plasma mass spectrometry (VPD-HR-ICPMS), we can achieve a quantitative analysis of 42 elements in wafer samples.

Physical Analysis of Semiconductor Wafers

A variety of high-resolution optical/electron/ion microscopes and specific spectrometers / diffractometers are used to control the process flow and analyze the physical structure of semiconductor wafers.